Methods of forming memory circuitry

ABSTRACT

The invention includes methods of forming memory circuitry. In one implementation, a semiconductor substrate includes a pair of word lines having a bit node received therebetween. A bit node contact opening is formed within insulative material over the bit node. Sacrificial plugging material is formed within the bit node contact opening between the pair of word lines. Sacrificial plugging material is removed from the bit node contact opening between the pair of word lines, and it is replaced with conductive material that is in electrical connection with the bit node. Thereafter, the conductive material is formed into a bit line.

RELATED PATENT DATA

This patent resulted from a continuation application of U.S. patentapplication Ser. No. 10/615,287, filed Jul. 7, 2003 Now U.S. Pat. No.6,921,692, entitled “Methods of forming Memory Circuitry”, naming KunalR. Parekh and Byron N. Burgess as inventors, the disclosure of which isincorporated by reference.

TECHNICAL FIELD

The invention is related to methods of forming memory circuitry.

BACKGROUND OF THE INVENTION

Many types of memory circuitry utilize a combination of word lines, bitlines and capacitors which are arranged to form one or more memoryarrays. In some instances, the bit lines are formed elevationally higherthan or overlapping with the capacitors, while in other instances thebit lines are formed elevationally lower than the capacitors.Regardless, peripheral control or other circuitry is commonly fabricatedat some location external to the array, and is conventionally referredto as peripheral circuitry. Such circuitry typically includes localinterconnect lines which interconnect various conductive nodes ofdifferent devices in the peripheral circuitry. Such nodes mightconstitute metal or metal compounds and/or diffusion regions of commonor differing conductivity types.

While the invention was motivated in addressing processing associatedwith the above-described circuitry, it is in no way so limited. Theinvention is only limited by the accompanying claims as literallyworded, without interpretative or other limiting reference to thespecification, and in accordance with the doctrine of equivalents.

SUMMARY OF THE INVENTION

The invention includes methods of forming memory circuitry. In oneimplementation, a semiconductor substrate includes a pair of word lineshaving a bit node received therebetween. A bit node contact opening isformed within insulative material over the bit node. Sacrificialplugging material is formed within the bit node contact opening betweenthe pair of word lines. Sacrificial plugging material is removed fromthe bit node contact opening between the pair of word lines, and it isreplaced with conductive material that is in electrical connection withthe bit node. Thereafter, the conductive material is formed into a bitline.

Other aspects and implementations are contemplated.

BRIEF DESCRIPTION OF THE DRAWINGS

Preferred embodiments of the invention are described below withreference to the following accompanying drawings.

FIG. 1 is a fragmented, diagrammatic sectional view of semiconductorwafer fragments in process in accordance with an aspect of theinvention.

FIG. 2 is a view of the FIG. 1 wafer fragments at a processing stepsubsequent to that shown by FIG. 1.

FIG. 3 is a view of the FIG. 2 wafer fragments at a processing stepsubsequent to that shown by FIG. 2.

FIG. 4 is a view of the FIG. 3 wafer fragments at a processing stepsubsequent to that shown by FIG. 3.

FIG. 5 is a view of the FIG. 4 wafer fragments at a processing stepsubsequent to that shown by FIG. 4.

FIG. 6 is a view of the FIG. 5 wafer fragments at a processing stepsubsequent to that shown by FIG. 5.

FIG. 7 is a view of the FIG. 6 wafer fragments at a processing stepsubsequent to that shown by FIG. 6.

FIG. 8 is a diagrammatic top plan view of FIG. 7.

FIG. 9 is a view of the FIG. 7 wafer fragments at a processing stepsubsequent to that shown by FIG. 7.

FIG. 10 is a view of the FIG. 9 wafer fragments at a processing stepsubsequent to that shown by FIG. 9.

FIG. 11 is a view of the FIG. 10 wafer fragments at a processing stepsubsequent to that shown by FIG. 10.

FIG. 12 is a view of the FIG. 11 wafer fragments at a processing stepsubsequent to that shown by FIG. 11.

FIG. 13 is a view of the FIG. 12 wafer fragments at a processing stepsubsequent to that shown by FIG. 12.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

This disclosure of the invention is submitted in furtherance of theconstitutional purposes of the U.S. Patent Laws “to promote the progressof science and useful arts” (Article 1, Section 8).

Exemplary preferred embodiments of methods of forming memory circuitryare described with reference to FIGS. 1–13. The particular circuitrydescribed is with respect to DRAM circuitry and with respect to buriedbit line memory circuitry. However, certain aspects of the invention arein no way so limited. Referring to FIG. 1, a semiconductor waferfragment in process is shown generally with reference numeral 10, andincludes a semiconductive substrate 22. In the context of this document,the term “semiconductor substrate” or “semiconductive substrate” isdefined to mean any construction comprising semiconductive material,including, but not limited to, bulk semiconductive materials such as asemiconductive wafer (either alone or in assemblies comprising othermaterials thereon), and semiconductive material layers (either alone orin assemblies comprising other materials). The term “substrate” refersto any supporting structure, including, but not limited to, thesemiconductive substrates described above. Further in the context ofthis document, the term “layer” encompasses both the singular and theplural unless otherwise indicated. Substrate 22 is shown in the form ofbulk monocrystalline substrate, although semiconductor-on-insulatorsubstrates and any other semiconductor substrate, whether existing oryet-to-be developed, are of course contemplated. The preferredembodiment substrate 10 is depicted as having a memory array area 12 anda peripheral circuitry area 14 peripheral to memory array 12.

A plurality of spaced-apart word lines 19, 21, 23 and 25 is formed oversubstrate 22, and in part defines individual substrate locations 26, 28and 30 with which electrical communication is desired. Substratelocations 26 and 30, on opposite sides of substrate location 28,constitute locations with which electrical communication will beestablished with individual storage capacitors, and are referred toherein as capacitor nodes. Substrate location 28 constitutes a locationwith which electrical communication will be established with a bit line,and is herein referred to as a bit node. In a preferred embodiment, thesubstrate locations comprise diffusion regions 27, 29 and 31,respectively, which are received within substrate 22. However of course,nodes 26, 28 and 30 might comprise other structures, for exampleelevated source/drains, plugs, etc., and include one or moreconductive/semiconductive layers and whether existing or yet-to-bedeveloped.

Word lines 19, 21, 23 and 25, and substrate locations 26, 28 and 30, areformed relative to an active area 32 which is isolated relative to otheractive areas by isolation regions 33, and which can be formed throughconventional or yet-to-be developed techniques, such as shallow trenchisolation. Each exemplary preferred embodiment word line is depicted asincluding a gate oxide layer 37, a polysilicon layer 13 and a silicideor higher conductive layer 15. An insulative cap 17 is provided, as areinsulative sidewall spacers 42. Other word line constructions and ormaterials can, of course, be utilized. For purposes of the continuingdiscussion, word lines 21 and 23 can be considered as comprising a firstpair of word lines having a bit node 28/29 received therebetween, andword lines 23 and 25 can be considered as a second pair of word lineshaving a capacitor node 30/31 received therebetween.

Peripheral circuitry area 14, by way of example only, is depicted ashaving a first node 34 and a second node 35. Such might constitutecommon or differing conductivity diffusion regions, as depicted, ormight constitute any other conductive material node location where it isdesired in one implementation to form some sort of local interconnectingline interconnecting a first node and a second node in the peripheralcircuitry area.

Referring to FIG. 2, insulative material 36 has been formed as part ofsubstrate 10. An exemplary material is borophosphosilicate glass (BPSG),for example formed over an underlying layer (not specifically shown) ofundoped silicon dioxide. Material 36 in the preferred embodiment hasbeen planarized, for example by CMP, although planarization is of coursenot required. Further if planarized, such might be conducted to producean alternate construction, for example layer 36 could be planarized atleast to the outer surface of caps 17. Regardless, a bit node contactopening 38 over bit node 28, capacitor node contact openings 39 and 40over capacitor nodes 26 and 30, respectively, a first peripheral contactopening 41 over first node 34, and a second peripheral contact opening42 over second node 35 have been formed within insulative material 36.Most preferably, the depicted contact openings are commonly formed, forexample utilizing lithographic (i.e., photolithographic) patterning andetch steps which are common to the formation of the depicted contactopenings. In the context of this document, “commonly forming” or“commonly formed”, and “commonly replaced” or “commonly replacing”,requires at least one or more processing steps which are common to theformation or removing of the stated material, structure or opening. Ofcourse, the invention contemplates the fabrication of any and only asingle one, or any subset, of the depicted contact openings as supportedby the literal wording of the accompanying claims. However in thedepicted embodiment, all openings are formed (preferably commonly) asshown in FIG. 2, and regardless whether material 36 has been planarized,and if so to what degree or point.

Referring to FIG. 3, sacrificial plugging material 44 is formed withinbit node contact opening 38, capacitor node contact openings 39 and 40,first peripheral contact opening 41 and second peripheral contactopening 42. The sacrificial plugging material might comprise insulativematerial, conductive material (including conductively dopedsemiconductive material) and/or semiconductive material regardless ofwhether conductively doped. By way of example only and in the depictedpreferred embodiment, sacrificial plugging material 44 is shown as beingin the form of a thin insulative liner 45 (i.e., silicon nitride orundoped silicon dioxide) having a doped or undoped planarized layer ofpolysilicon 46 formed thereover. Such are exemplary preferred materialswhere diffusion regions 27, 29, 31, 34 and 35 comprise silicon toprovide an etch stopping barrier between preferred polysilicon material46 and such diffusion regions, as will be apparent from the continuingdiscussion. Alternately by way of example only in the depictedembodiment, an interfacing etch stopping oxide might be formedessentially only at node locations 26, 28, 30, 34 and 35 by a thermal orplasma oxidation of the material of the respective diffusion regions.Regardless, in the exemplary preferred embodiment, sacrificial pluggingmaterial 44 is commonly formed with respect to openings 38, 39, 40, 41and 42.

Referring to FIG. 4, sacrificial plugging material 44 and insulativematerial 36 have been planarized back (i.e., by chemical-mechanicalpolishing) proximate to, more preferably at least to, an outer surfaceof insulative caps 17. Thereafter, an insulating layer 48 has beendeposited. An exemplary material is undoped silicon dioxide deposited bydecomposition of tetraethylorthosilicate, with an exemplary thicknessfor layer 48 being 400 Angstroms. Contact openings/removal openings 50have been etched therethrough to sacrificial plugging material 44 withinbit node contact opening 38, first peripheral contact opening 41 andsecond peripheral contact opening 42. Exemplary preferred techniques fordoing so include lithographic patterning and etch.

Referring to FIG. 5, sacrificial plugging material 44 has been removedfrom bit contact opening 38, first peripheral contact opening 41 andsecond peripheral contact opening 42 while leaving sacrificial plugging44 within capacitor node contact openings 39 and 40. Preferred removingtechniques are by etching, with such etching removing the sacrificialplugging material from the bit node, first peripheral and secondperipheral contact openings through removal openings 50. For example,where the sacrificial plugging material includes a polysilicon material46, an exemplary etching chemistry is aqueous tetramethylammoniumhydroxide. This can be followed by a short timed etch of insulativelayer 45 (for example using an HF based chemistry for silicon dioxide, afluorocarbon chemistry for silicon nitride) to clear layer 45 from overnodes 28, 34 and 35, as shown.

Referring to FIG. 6, the removed sacrificial plugging material has beenreplaced with conductive material 52 that is in electrical connectionwith bit node 28, first node 34 and second node 35. Preferably, suchmaterial is commonly replaced by deposition common to the substrate andthe respective openings to result in the exemplary FIG. 6 construction.In the illustrated example, conductive material 52 comprises a firstlayer 54 and a second layer 56. By way of example only, layer 54 mightbe formed to to provide a diffusion barrier function between substrate22 and conductive layer 56, and/or to provide an adhesion/glue layerfunction to facilitate adherence of layer 56 to the ultimate substrate.By way of example only, exemplary materials for layer 54 includeconductive metal suicides (whether chemical vapor deposited or formed bya salicide or other process), and conductive metal nitrides (whetherstoichiometric, enriched in metal or other material), as well as anyother conductive material. An exemplary material for layer 56 is anelemental metal or an elemental alloy, for example tungsten. Of course,conductive material 52 could comprise a single, or more than theillustrated two, layers and be any conductive material, includingconductively doped semiconductive material. An insulative capping layer58 (i.e., silicon nitride) is formed over conductive material 52.

Referring to FIGS. 7 and 8, conductive material 52 has been formed intoa bit line 60 and a local interconnect line 62. The top plan layoutdepicted by FIG. 8 is merely an exemplary layout. Alternate layouts,whether existing or yet-to-be developed, could also of course beemployed, for example as shown in our U.S. Pat. No. 6,458,649. Anexemplary preferred method for forming the conductive material into theillustrated bit line and local interconnect line includes lithography(i.e., photolithography) and etch. However, any method of forming therespective materials into one or both of the illustrated lines iscontemplated, whether existing or yet-to-be developed. For example, andby way of example only, such bit line forming could be by a damasceneprocess. For example, some suitable insulative material could bedeposited over the FIG. 5 construction, with desired line-shaped troughsand contact openings etched therein. Conductive material could then beformed to overfill such troughs and openings and the conductive materialplanarized back to define the desired isolated conductive line outlines.In one preferred embodiment, the illustrated patterning to form lines 60and 62 comprises lithography and etch using at least some commonlithographic and etching steps to the depicted layers, for example suchthat a single masking is conducted.

Referring to FIG. 9, anisotropically etched insulative sidewall spacers64 have been formed about the respective lines 60 and 62. An exemplarypreferred material is silicon nitride.

Subsequent processing will preferably form a capacitor of a memory cellof the memory circuitry after having formed the bit line and localinterconnect line. Such is shown, by way of example only, with respectto FIGS. 10–13. Referring to FIG. 10, another insulative layer 66 hasbeen deposited. An exemplary material is BPSG. Openings 68 have beenformed therethrough, and through insulative material 48 over sacrificialplugging material 44 received within remnant portions of capacitor nodecontact openings 39 and 40.

Referring to FIG. 11, sacrificial plugging material 44 has been removedfrom capacitor node contact openings 39 and 40, for example as describedabove with respect to sacrificial material removal from openings 38, 41and 42.

Referring to FIG. 12, conductive material 70 has been deposited andplanarized back to fill openings 68. Such might, of course, include morethan one conductive material.

Referring to FIG. 13, another insulative layer 72 has been deposited.Storage node container openings 74 have been formed therein, and astorage node 76, a capacitor dielectric layer 78 and a common outercapacitor plate 80 formed, as shown. Further and by way of example only,a contact opening (not shown) could be formed to local interconnect line62 commensurate with the forming of container openings 74.

Such provides but one example of forming exemplary capacitors ofrespective memory cells of memory circuitry in electrical connectionwith capacitor nodes 26 and 30, and whereby an elevationally outermostelectrode (i.e., 80) of a capacitor is received everywhere elevationallyoutward of the illustrated bit line. Of course, attributes of theinvention might be practiced in the formation of memory circuitry notcomprising buried bit line memory cells without departing from certainprinciples and aspects of the invention.

By way of example only, and not in any way of limitation, the inventionmight provide an advantage over certain previous technology in theprovision of low resistant contacts to the digit line node whileenabling the commensurate fabrication of one, more or all localinterconnect lines within the periphery between various metal, metalcompound, n+ and p+ regions, with reduced masking steps where masking isutilized.

In compliance with the statute, the invention has been described inlanguage more or less specific as to structural and methodical features.It is to be understood, however, that the invention is not limited tothe specific features shown and described, since the means whereindisclosed comprise preferred forms of putting the invention into effect.The invention is, therefore, claimed in any of its forms ormodifications within the proper scope of the appended claimsappropriately interpreted in accordance with the doctrine ofequivalents.

1. A method of forming memory circuitry comprising: providing asemiconductor substrate comprising a pair of word lines having a bitnode formed within semiconductive material of the substrate between theword lines, and comprising insulative sidewall spacers over opposingsidewalls of the word lines facing the bit node; depositing insulativematerial over the pair of word lines, the bit node and the insulativesidewall spacers; forming a bit node contact opening within theinsulative material over the bit node; forming sacrificial pluggingmaterial within the bit node contact opening between the pair of wordlines; from the bit node contact opening, removing sacrificial pluggingmaterial which is received between and at some common elevation withconductive portions of the pair of word lines, and replacing it withconductive material that is in electrical connection with the bit nodeand which is received over the insulative material; and after thereplacing, forming the conductive material into a bit line.
 2. Themethod of claim 1 wherein the sacrificial plugging material comprisesinsulative material.
 3. The method of claim 1 wherein the sacrificialplugging material comprises conductive material.
 4. The method of claim1 wherein the sacrificial plugging material comprises conductively dopedsemiconductive material.
 5. The method of claim 1 wherein thesacrificial plugging material comprises semiconductive material.
 6. Themethod of claim 1 wherein the sacrificial plugging material comprisesinsulative material and semiconductive material.
 7. A method of formingmemory circuitry comprising buried bit line memory cells, comprising:providing a semiconductor substrate comprising a first pair of wordlines having a bit node formed within semiconductive material of thesubstrate between the first pair of word lines, and a second pair ofword lines having a capacitor node formed within semiconductive materialof the substrate between the second pair of word lines; commonly forminga 1) a bit node contact opening within insulative material over the bitnode and a capacitor node 2) a capacitor node contact opening withininsulative material over the capacitor node; commonly formingsacrificial plugging material within 1) the bit node contact opening and2) the capacitor node contact opening; removing sacrificial pluggingmaterial from the bit node contact opening while leaving sacrificialplugging material within the capacitor node contact opening; replacingthe removed sacrificial plugging material from the bit node contactopening with conductive material that is in electrical connection withthe bit node and which is received over the insulative material; afterthe replacing, forming the conductive material into a bit line; andafter forming the bit line, removing sacrificial plugging material fromthe capacitor node contact opening.
 8. The method of claim 7 comprisingafter removing the sacrificial plugging material from the capacitor nodecontact opening, forming a capacitor of a memory cell of the memorycircuitry in electrical connection with the capacitor node.
 9. Themethod of claim 7 wherein the sacrificial plugging material comprisesinsulative material.
 10. The method off claim 7 wherein the sacrificialplugging material comprises conductive material.
 11. The method of claim10 wherein the sacrificial plugging material comprises conductivelydoped semiconductive material.
 12. The method of claim 7 wherein thesacrificial plugging material comprises semiconductive material.
 13. Themethod of claim 7 wherein the sacrificial plugging material comprisesinsulative material and semiconductive material.
 14. A method of formingmemory circuitry comprising: providing a semiconductor substrate havinga memory array area and a peripheral circuitry area peripheral to thememory array area, the substrate comprising a first pair of word lineshaving a bit node formed within semiconductive material of the substratebetween the first pair of word lines, the bit node being received withinthe memory array area; commonly forming 1) a bit node contact openingwithin insulative material over the bit node, 2) a first peripheralcontact opening within insulative material over a first node in theperipheral circuitry area, and 3) a second peripheral contact openingwithin insulative material over a second node in the peripheralcircuitry area; forming sacrificial plugging material within the bitnode contact opening, the first peripheral contact opening and thesecond peripheral contact opening; removing sacrificial pluggingmaterial from the bit node contact opening, the first peripheral contactopening and the second peripheral contact opening, and replacing it withconductive material that is in electrical connection with the bit node,the first node and the second node and which is received over theinsulative material; and after the replacing, forming the conductivematerial into a bit line in electrical connection with the bit node andinto a local interconnect line in the peripheral circuitry areaelectrically interconnecting the first and second nodes.
 15. The methodof claim 14 comprising forming a capacitor of a memory cell of thememory circuitry after forming the bit line and the interconnect line.16. The method of claim 14 wherein the sacrificial plugging materialcomprises insulative material.
 17. The method of claim 14 wherein thesacrificial plugging material comprises conductive material.
 18. Themethod of claim 17 wherein the sacrificial plugging material comprisesconductively doped semiconductive material.
 19. The method of claim 14wherein the sacrificial plugging material comprises semiconductivematerial.
 20. A method of forming memory circuitry comprising buried bitline memory cells, comprising: providing a semiconductor substratehaving a memory array area and a peripheral circuitry area peripheral tothe memory array area, the substrate comprising a first pair of wordlines having a bit node formed within semiconductive material of thesubstrate between the first pair of word lines, and a second pair ofword lines having a capacitor node formed within semiconductive materialof the substrate between the second pair of word lines, the bit node andthe capacitor node being received within the memory array area; commonlyforming 1) a bit node contact opening within insulative material overthe bit node, 2) a capacitor node opening within insulative materialover the capacitor node, 3) a first peripheral contact opening withininsulative material over a first node in the peripheral circuitry area,and 4) a second peripheral contact opening within insulative materialover a second node in the peripheral circuitry area; forming sacrificialplugging material within the bit node contact opening, the capacitornode contact opening, the first peripheral contact opening and thesecond peripheral contact opening; removing sacrificial pluggingmaterial from the bit node contact opening, the first peripheral contactopening and the second peripheral contact opening while leavingsacrificial plugging material within the capacitor node contact opening;and commonly replacing the removed sacrificial plugging material withconductive material that is in electrical connection with the bit node,the first node and the second node and which is received over theinsulative material; after the replacing, forming the conductivematerial into a bit line in electrical connection with the bit node andinto a local interconnect line in the peripheral circuitry areaelectrically interconnecting the first and second nodes; and afterforming the bit line and the local interconnect line, removingsacrificial plugging material from the capacitor node contact opening.21. The method of claim 20 wherein the sacrificial plugging materialcomprises insulative material.
 22. The method of claim 20 wherein thesacrificial plugging material comprises conductive material.
 23. Themethod of claim 22 wherein the sacrificial plugging material comprisesconductively doped semiconductive material.
 24. The method of claim 20wherein the sacrificial plugging material comprises semiconductivematerial.
 25. The method of claim 20 wherein the sacrificial pluggingmaterial comprises insulative material and semiconductive material. 26.The method of claim 1 wherein the sacrificial plugging materialcomprises two different materials.
 27. The method of claim 26 whereinthe removing comprises etching, said etching comprising two differentetching steps.
 28. The method of claim 27 wherein the sacrificialplugging material comprises an outer material received over an etch stopmaterial, the removing comprising etching the outer material selectivelyto the etch stop material.
 29. The method of claim 1 wherein forming thesacrificial plugging material comprises depositing and subsequentlyplanarizing sacrificial plugging material.
 30. The method of claim 1wherein forming the sacrificial plugging material comprises thermallyoxidizing the bit node.
 31. The method of claim 1 wherein forming thesacrificial plugging material comprises plasma oxidizing the bit node.